HITACHI MASS FLOW CONTROLLER

For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes

​

Low cost

Custom-made for applications that require top performance but not the corrosion resistance or high leak integrity of metal seals, the FC-R7700 Series is cost-effective, low noise and low power consumption

​

Easy integration

These models feature standard electrical connectors and critical dimensions to easily fit in the existing systems with lower noise and lower power consumption than the case of digital model.

Fast response

Advances in the FC-R7700 Series' technical design delivery enhanced performance compared to competing mass flow controller (MFC). These advances include a highly sensitive, rapid-response, small-diameter sensor. With normally-open and normally closed solenoid designs, the FC-R7700 Series provides a flexibility for many applicable needs and produce a settling time of ≤ 2 sec. Between set points. (≤ 3sec. For FC-R7720CD / FC-R7720D)

Unsurpassed Reliability

The usage of less number of the electrical devices than the case of digital model and no usage of the DC-DC converter results the highly reliable performance in a long term.

​

​