Process Control in PVD Coating – Stable Reactive Sputtering with Speedflo and Optix

Why Process Control Is Essential in PVD

In plasma and vacuum technology, precise process control is a key success factor. In reactive sputtering, instabilities occur when the gas flow rate reaches the range of stoichiometric film compositions.

Without effective control, identical process parameters can produce very different outcomes – such as variations in reactive gas partial pressure, target voltage, or deposition rate. The result: inconsistent film quality, higher scrap rates, and reduced efficiency.

Speedflo and Optix – Reliable Feedback Control for Reactive Sputtering

Stability in PVD processes requires advanced feedback control systems.

• Speedflo, developed by Gencoa, keeps reactive sputtering stable and minimizes process deviations.

• Optix provides the sensor input: the optical emission spectrometer analyzes plasma light in real time and delivers highly reliable signals for closed-loop control.

Advantages of Optix in Industrial Coating

• Real-time monitoring with millisecond response times

• Detection of up to 20 gases simultaneously

• Wide pressure range – eliminating additional differential pumping

• Robust design and lower operating costs compared to residual gas analyzers (RGA)

With Optix and Speedflo, coaters achieve greater process stability, reproducibility, and productivity.

Case Study: PVT as an Example

In collaboration with PVT Plasma und Vakuumtechnik GmbH, AVALUXE International GmbH, and Gencoa Ltd., Speedflo and Optix were successfully integrated into an in-line PVD coating system.

Under the technical lead of our process engineer Dr. Anas Ghailane, the system was not only implemented but also tailored to the specific requirements of the equipment. PVT also demonstrates how modern PVD systems can support future technologies, including hydrogen (H₂) applications, where coated components are essential for fuel cells and electrolyzers.

Benefits for the Coating Industry

For equipment operators and coating service providers, the integration of Optix and Speedflo offers clear advantages:

• Higher process stability reduces scrap and rework

• Reproducible results increase efficiency and throughput

• Reliable production even in large-scale applications

• Future-proof technology for sustainable industrial competitiveness

Conclusion: Process Control as the Key to Industrialization

The PVT case study underlines a central point: process control is not a detail, but the key to scaling innovative PVD coating technologies into robust industrial production.

Solutions like Speedflo and Optix ensure stability, optimize costs, and make PVD a reliable technology – whether in decorative coatings, tribological layers, or hydrogen energy applications. If you want to know more about Optix and Speedflo please contact tvartianen@avaluxe.de