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How to increase your coating material yield in sputtering

Investigation of Titanium target pieces for PVD sputtering


Ti target for PVD sputtering / increase coating material yield
Ti target for PVD sputtering


After using Titanium Grade 2 we faced different erosion profiles and obvious the material seems to have also different grain size
  • Preparation: US cleaning in 2-Propanol, Cross section through the sputter groove

  • Method: Scanning Electron Microscope LEO 1530 VP| Light Optical Microscope Olympus BX51, digital imaging Keyence VHX 700

The sputter profile after end of use had big visible differences


pvd sputtering/ increase coating material yield