Use Case Rübig - Faster to a new PVD system with monitoring tools
- Thomas Vartiainen
- Jul 17
- 4 min read
How the use of modern vacuum monitoring and control devices accelerates and simplifies the development of a new generation of PVD systems.
STARTING SITUATION
Rübig Anlagentechnik is introducing a new PVD system series to the market, which is equipped with HiPIMS-ready planar sputtering magnetrons. The systems are inherently suitable for metallic and reactive processes.
CHALLENGE
What did RUBIG see as the biggest challenges in the development of the coater and the new processes?
The development team believed that controlling reactive gas processes would be the biggest challenge facing them. "We consider sensor technology and reactive gas control to be essential to enable a stable process window and not slip into a poisoned state:
"Is my process currently in a suboptimal or inefficient mode?"
"Do I have to sputter clean?”
What would have been the consequences of not finding an adequate solution?
"An unstable process window can lead to incorrect or unsatisfactory coating results."
SOLUTION
Two systems from Liverpool-based GENCOA were defined as the solution:
1. Reactive gas control using Gencoa Speedflo, with each unit providing 8 input channels (sensors) as well as output channels for controlling the mass flow controllers with the reactive gases. The device's own software was used as the Unser interface during development.
2. The use of Gencoa Optix for gas analysis and monitoring. The device, which is based on remote plasma emission monitoring, is attached to the chamber wall via a simple flange and continuously detects all gases in the pressure range from 0.5 mbar to 10-6 mbar.
"The first generation of Rübig systems already included magnetrons from Gencoa. It was important to us to form a functioning overall concept from a single source when planning the 2nd plant with magnetron sputtering, process control and monitoring."
RESULT
"Optix is a very useful tool that I would recommend to every user for their systems."
Has the desired goal been achieved?
1. Reactive gas control
"The reactive gas control system used can significantly shorten development processes. Speedflo makes it possible to find process parameters more quickly, and over a wide range of pressures and temperatures."
Example: Introduction of a new layer.
"With Speedflo reactive gas control: An amount of 17 sccm reactive gas leads to good results >> no further tests necessary."
Remark: The gas amount is continuously automatically calculated by the Speedflo.
"Without device: 15 sccm > silver >> new attempt with 20 sccm > bronze >> More and more iterations with +/- 1 sccm necessary."
2. Plasma-Monitoring
"The plasma monitoring/Optix system provided valuable information on possible leaks or outgassing of components during the commissioning phase and during plant conversions.
Optix is a very useful tool that I would recommend to every user for their systems.
Optix can determine the level of remaining water in the system, so (with integration and automation) you have a perfect starting condition for the coating process.
Optix is very helpful in detecting leaks quickly. The local localization is then carried out with special equipment.
With Optix it is possible to detect residues of hydrocarbons. This is particularly helpful in mixed operation of different layers, as their combination can have a negative effect on adhesion and other functional properties. Here, too, Optix (if we integrate and automate it) can make a valuable contribution to process stability.
It is possible that a mass spectrometer could be used for analysis and lead to similar findings, but it is much more complex; including the need for additional installation of differential pumps; moreover, it would not be permanently connected to the coater."
OUTLOOK
Are there any extensions and improvements planned?
"A final step that is still pending is the integration of the control software into Rübig's system control."
The devices used
About the companies involved
RÜBIG Anlagentechnik
RUBIG developed from its die forge, founded in 1946, into an internationally successful group of companies. The Industrial Furnaces, Heat Treatment, Die Forge and Technology divisions are experts in the heat treatment of steel and aluminum materials. Today, the RUBIG Group is a high-tech supplier in the aerospace, automotive and medical technology sectors, among others.
So far, RUBIG has offered Plasmanitriding technology PACVD and CVD coatings and furnaces, but now, the company expanded its technologies with PVD. The so-called "MICROPULS® Lotus" system was named after the lotus flower, as both systems have and create special surface properties, which protect them from external influences. Thanks to magnetron sputtering technology, the company can create perfectly smooth and homogeneous coatings.
GENCOA
Gencoa provide components and expert solutions for all applications in the field of vacuum coating.
All stages of the plasma deposition process are covered by the range of products and services supplied, with Gencoa products including plasma pre-treatment and ion sources, planar and rotatable magnetron sputter cathodes, and instruments for process control and gas analysis.
A comprehensive range of services cover magnetic field design, remote or onsite process assistance, and tailored support for specific applications.
AVALUXE
Avaluxe is a specialist in PVD coating technology with over 30 years of experience in the optimisation of coating materials and processes. In addition to the design and supply of PVD materials, the company's core competences include consulting and the development of customised solutions. Avaluxe is a service and sales partner of GENCOA with a focus on Germany and Austria.
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