DC Power Systems
Access vast feature sets and
Reliable performance
Looking for proven, precise DC power solutions?
We offer standard DC and pulsed-DC power-delivery options.
Thanks to vast feature sets and reliable performance, our power generators are used in nearly every manufacturing market - semiconductor, flat panel, glass, thin film, etc.
Ascent AMS Series
Stable Power Delivery for Extreme Arc Conditions and Highly Repeatable Films
Ascent® AMS power supplies deliver stable, repeatable power, regardless of process material or cathode design. The AMS provides advanced arc management, allowing maximum power delivery with faster recovery to process. Extreme fast recovery also means extremely low energy delivered through arcs, preventing substrate damage.
For high power applications, the Ascent AMS can be used in primary / secondary configuration. Common applications include output configurations over 100 kW. However, the combined water / air cooling design keeps the generator footprint to a minimum.
DESRIPTION
Advanced Energy's front-line DC generator provides performance and reliability required in dual-magnetron sputtering applications.
Arcs are actively managed, versus a generic pre-set arc response.
Less than 0.4 mJ per 1 kW of output energy
Stable, repeatable process through arcing conditions
Primary / secondary for high power applications
Higher power levels with reduced arc damage
BENEFIT
Obtain high film quality and throughput
Reduce film, substrate, and equipment damage
Achieve stable throughput and power delivery under extreme arcing conditions
Easily integrate and control
FEATURES
Arc Management System ™ (AMS) technology - customer pre-sets for metal and ceramic targets
Set Point Compensation ™ technology
Arc Sync® technology - primary / secondary up to 12 units
Ethernet, EtherCAT®, DeviceNet®, Profibus, RS-232/485, Ethernet / IP, and analog communications
APPLICATIONS
Flat panel displays
Glass coatings
Industrial coatings
Solar photovoltaics
MDX Series
The MDX Series Enables Low-Power Magnetron Sputtering in a Small and Affordable Package
Tight regulation, superior arc quenching, and low stored output energy make MDX Series DC power supplies an industry leader. Intended for continuous hard use in a vacuum environment, these rugged power supplies are most commonly used as DC magnetron sputtering drives.
They also offer tight regulation as bias supplies in RF sputtering and etching systems. Their compact design makes them the primary choice for laboratory systems.
DESRIPTION
An industry workhorse, the MDX Series diligently serves low-power applications where robust, accurate power delivery is a must.
Available in 500 W, 1 kW, and 1.5 kW models
Excellent process results with low stored energy
Backed by Advanced Energy's Global Service organization
BENEFIT
Tight regulation
Improved yield
Reduced target burn-in time
High reliability
Easy maintenance and replacement
FEATURES
Low stored output energy with adjustable arc suppression time
Low ripple
Compact design
Voltage, current, and power regulation modes
Front panel and analog interface control
APPLICATIONS
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Deposition
Pinnacle Series
The Most Recognized DC Power Supply for <= 20 kW Processes
The field-proven Pinnacle® DC generators deliver remarkable process consistency and control for significantly reduced variation and higher yields.
This compact, versatile package offers outstanding arc management with low stored energy, fast arc response, and wide, full-power operational impedance range.
DESCRIPTION
Advanced Energy's Pinnacle DC generators enable quality thin films and maximum process efficiency.
Buy only what you need: Power options from 6 to 20 kW
Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy
Compact air-cooled design expandable in primary / secondary configuration
BENEFITS
Lower operating and installed costs
Achieve fast arc response
Configure arc response
Maximize process efficiency
Precisely control your process
FEATURES
Low stored energy - less than 1 mJ per 1 kW of output
No tap changes
Output repeatability of ± 0.1%
Target conditioning cycle (TCC) - minimizes conditioning time for new targets
Joule mode - optimized energy delivery
APPLICATIONS
Deposition
Flat panel displays
Industrial coatings
Semiconductor Manufacturing
Solar photovoltaics
Pinnacle 3000
Industry-Leading Pinnacle DC Power Technology in a 3000 W Package
The Advanced Energy Pinnacle 3000 DC power supply provides extremely high efficiency and power factor, which results in low operating and install costs.
Pinnacle process consistency and control significantly reduce variation and enable higher yields in both process and bias applications.
DESCRIPTION
Robust, compact DC generator designed exclusively for low power applications where precision and process repeatability are critical.
Enables superior film quality with less than 6 mJ / kW delivered arc energy
Run-to-run consistency: Better than 0.1% repeatability
Wide process range - impedances from 370 to 1000 VDC
BENEFITS
Proven Pinnacle performance and reliability
Versatile - excellent in both process and bias applications
Fast, configurable arc response - low arc damage
Precise process control
FEATURES
Extremely high efficiency and power factor
Compact - 3000 W in a 2U, ½-rack package
Wide, single tap
Profibus and RS-232 serial communications 400 VAC input only
Low stored energy - less than 6 mJ per 1 kW of output
Output repeatability of ± 0.1% at greater than 15% power
APPLICATIONS
-
Industrial coatings
DC and Pulsed-DC Solvix
The Best in DC and Pulsed-DC Power Delivery Unify
Solvix® DC and pulsed-DC power supplies for sputtering applications offer precise accuracy and proven repeatability thanks to more than a decade in the field.
With a wide range of power and frequency levels, pulsing, and multiple communications options, Solvix power supplies provide a rugged and cost-effective solution for your unique process.
DESCRIPTION
A robust, coordinated suite of Precision PowerTM supplies specifically designed to enable advanced, high-tech coatings.
Ease of operation and configuration with modular DC and pulsed-DC solutions
Industry-leading reliability while powering the extreme dynamics of plasma processes
Improved film quality with industry-leading power regulation and arc management
BENEFITS
Proven reliability, accuracy, and repeatability
Reduced substrate damage and process contamination
Adaptability to a broad range of process requirements
Efficient installation and service
Worldwide support network
FEATURES
DC and pulsed DC units
Outstanding arc handling
Current, power, and voltage regulation modes
Air and water cooling
Multiple units configurable for varying high power requirements
APPLICATIONS
Flat panel displays
Glass coatings
Industrial coatings
Solar photovoltaics